An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提高非球曲面超精密加工机廓跟踪精度
误差补偿控制方法。
An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提高非球曲面超精密加工机廓跟踪精度
误差补偿控制方法。
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