MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
机电系统(MEMS)将
21
最重要的研究领域之一,而
能源器件
MEMS
中一个重要
,
发展直接关系到MEMS在某些领域中的应用。