MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
机电系统(MEMS)将
21世纪最重要的
域之一,而
能源器件
MEMS
一个重要分支,
发展直接关系到MEMS在某些
域
的应用。